Successful Development of Korean CVD SiC Paddles: Life Extension Technology in High Temperature Vacuum Environment

Korean CVD SiC paddles offer enhanced durability and thermal resistance, extending lifespan and reliability in high-temperature vacuum environments for semiconductors.
Technology to improve CVD SiC coating and semiconductor equipment durability by 200%

Advancements in CVD SiC coating technology enhance semiconductor equipment durability by 200%, offering superior thermal stability and corrosion resistance.