日: 2024年11月23日

The Crucial Role and Application Cases of SiC-Coated Graphite Susceptors in Semiconductor Manufacturing

Semicera Semiconductor plans to increase the production of core components for semiconductor manufacturing equipment globally. By 2027, we aim to establish a new 20,000 square meter factory with a total investment of 70 million USD. One of our core components, the silicon carbide (SiC) wafer carrier, also known as a susceptor, has seen significant advancements. So, what exactly is this tray that holds the wafers? In the wafer manufacturing process, epitaxial layers are built on certain wafer substrates to create devices. For example, GaAs epitaxial layers are prepared on silicon substrates for LED devices, SiC epitaxial layers are grown on conductive SiC substrates for power applications like SBDs and MOSFETs, and GaN […]