炭化ケイ素カンチレバーパドル

Silicon carbide paddle, also known as silicon carbide cantilever paddle, silicon carbide cantilever beam is a kind of silicon carbide ceramic products after 1850℃ high temperature sintering, but high temperature sintering silicon carbide ceramic is a special ceramic products, by fine particles α-SiC and additives pressed into a blank, in contact with liquid silicon at high temperature, carbon in the blank and infiltration of Si reaction, the formation of β-SiC, And combined with α-SiC, free silicon filled the porosity, so as to obtain high density ceramic materials; It has various superior properties of industrial ceramics.

SiC Cantilever paddle is being used in the diffusion coating furnace of the photovoltaic industry for coating monocrystalline and polycrystalline silicon wafers. Its characteristic enables it to withstand high temperature and corrosion, giving it a long life span.
The SiC Cantilever paddle delivers SiC boats /quartz boats which carry silicon wafers into the high temperature diffusion coating furnace tube.
The length of our SiC Cantilever paddle ranges from 1,500 to 3,500 mm. SiC Cantilever paddle’s dimension can be tailor made according to customer’s specification.

Physical properties of Recrystallized Silicon Carbide
Property	Typical Value
Working temperature (°C)	1600°C (with oxygen), 1700°C (reducing environment)
SiC content	> 99.96%
Free Si content	< 0.1%
Bulk density	2.60-2.70 g/cm³
Apparent porosity	< 16%
Compression strength	> 600 MPa
Cold bending strength	80-90 MPa (20°C)
Hot bending strength	90-100 MPa (1400°C)
Thermal expansion @1500°C	4.70 10^-6/°C
Thermal conductivity @1200°C	23 W/m•K
Elastic modulus	240 GPa
Thermal shock resistance	Extremely good