Graphite Susceptor with Silicon Carbide Coating 6 pieces 6 inch wafer Carrier

Product Description

In high-temperature processes (e.g., CVD, MOCVD, epitaxial growth) in the semiconductor, photovoltaic, and new energy industries, the durability and stability of wafer carriers have a direct impact on productivity and cost. 6-inch Silicon Carbide-coated graphite carriers (pack of 6) from Semicera Semiconductor are specifically designed for harsh process environments, and offer a high-temperature, corrosion-resistant, and long-life solution to your production line, with state-of-the-art materials and technologies. production line with cutting-edge materials and process technology to provide a high-temperature, corrosion-resistant, long-life solution that helps reduce downtime and improve capacity consistency.

Core Benefits: Why Choose Semicera’s Silicon Carbide Coated Graphite Carriers?

1.Superior Performance for Longer Life
CVD Silicon Carbide Coating Technology: High purity Silicon Carbide (SiC) is uniformly coated on the surface, which significantly improves resistance to high temperature oxidation (up to 1600°C+) and chemical corrosion, and avoids the graphite substrate from reacting with process gases, reducing the risk of wafer contamination.

Ultra-low particle shedding rate: Precision coating process ensures smooth and dense surface, reduces wafer scratches and particle contamination, and guarantees process yield.

2.High-efficiency production design, reducing overall costs
Standardized 6-piece configuration: Adapt to mainstream 6-inch wafer production lines, support batch processing, shorten the process cycle, and increase production capacity.

Excellent thermal expansion coefficient matching: graphite substrate and silicon carbide coating are highly compatible with the thermal properties, ensuring structural stability at high temperatures, reducing deformation and cracking, and extending the service life to more than 3 times that of ordinary graphite carriers.

3.Full-process quality assurance, worry-free delivery
Stringent quality control standards: From high-purity isostatic graphite substrate to coating process, the whole process passes SEM/EDS testing, and meets ASTM and semiconductor industry specifications.

Fast response to customization: support the adjustment of size, coating thickness and other parameters to meet the needs of special processes.

Technical Parameters

• Material: Isostatic graphite + CVD silicon carbide coating
• Applicable wafer size: 6 inches
• Single loading capacity: 6 wafers
• Maximum working temperature: 1600°C (inert gas environment)
• Coating thickness: 80-120μm (customizable)
• Surface roughness: Ra ≤0.8μm

Application scenarios: escorting key process links

1. Semiconductor manufacturing: silicon epitaxy, GaN deposition, silicon carbide device production
2. Photovoltaic field: CVD coating for high-efficiency solar cell wafers
3. New energy materials: high temperature sintering of lithium anode materials

Four Reasons to Choose Semiconductor

✅ Deep plunge in the industry for nearly a decade: specializing in semiconductor core component R&D since 2015, serving more than 200 customers worldwide, including first-tier PV and semiconductor companies.
✅ Technology Driven Innovation: We have mastered the core technology of CVD Silicon Carbide coating, and have been awarded ISO 9001 certification and many patents.
✅ Sustainable Manufacturing Commitment: Adopting green production processes, reducing energy consumption and waste emissions, and practicing social responsibility.
✅ Full-cycle service support: from selection and consultation to after-sales maintenance, the professional team provides 24-hour technical response.
Act now to upgrade your process equipment!

Whether you are building a new production line or replacing an old carrier, Semicera’s Silicon Carbide coated graphite carriers will be your reliable partner in improving your competitiveness with lower overall cost and higher process stability.

Click to inquire for an exclusive quote or request a free sample for testing!

📞 Contact Team: +86-13373889683
📧 Email: sales01@semi-cera.com
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